Electrostatic chuck

ABSTRACT

According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate has first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer has a first surface at the first major surface side and a second surface at a side opposite to the first surface. The first electrode layer includes a first portion including the first surface. The first electrode layer includes a ceramic component and a metal component. A concentration of the ceramic component in the first portion is higher than an average concentration of the ceramic component in the first electrode layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromJapanese Patent Application No.2019-54723, filed on Mar. 22, 2019, andNo.2019-223574, filed on Dec. 11, 2019; the entire contents of which areincorporated herein by reference.

FIELD

Embodiments described herein relate generally to an electrostatic chuck.

BACKGROUND

An electrostatic chuck is used to attract and hold a processing objectsuch as a semiconductor wafer, a glass substrate, etc., inside a plasmaprocessing chamber that performs etching, CVD (Chemical VaporDeposition), sputtering, ion implantation, ashing, etc. Theelectrostatic chuck applies electrical power for electrostaticattraction to a built-in electrode and chucks a substrate such as asilicon wafer, etc., by an electrostatic force.

When performing plasma processing, for example, plasma is generated byapplying a voltage from an RF (Radio Frequency) power supply (a highfrequency power supply) to an upper electrode provided at an upperportion inside a chamber and to a lower electrode provided lower thanthe upper electrode.

In a conventional electrostatic chuck, the plasma is generated using, asthe lower electrode, a base plate provided in a lower portion of theelectrostatic chuck. However, the plasma control is limited in such aconfiguration under conditions where it is desirable to perform bettercontrol of the wafer in-plane distribution of the plasma density byselecting the appropriate frequency. Therefore, in recent years, it isbeing attempted to increase the plasma controllability by providing alower electrode for plasma generation built into a dielectric layerprovided on a base plate.

SUMMARY

According to the embodiment, an electrostatic chuck includes a ceramicdielectric substrate, a base plate, at least one first electrode layer,and at least one second electrode layer. The ceramic dielectricsubstrate has a first major surface and a second major surface. Thefirst major surface is where an object to be chucked is placed. Thesecond major surface is at a side opposite to the first major surface.The base plate supports the ceramic dielectric substrate. The firstelectrode layer is provided inside the ceramic dielectric substrate. Thefirst electrode layer is connected to a high frequency power supply. Thesecond electrode layer is provided inside the ceramic dielectricsubstrate. The second electrode layer is connected to a chucking powersupply. The first electrode layer is provided between the first majorsurface and the second major surface in a Z-axis direction. The Z-axisdirection is from the base plate toward the ceramic dielectricsubstrate. A dimension in the Z-axis direction of the first electrodelayer is larger than a dimension in the Z-axis direction of the secondelectrode layer. The second electrode layer is provided between thefirst electrode layer and the first major surface in the Z-axisdirection. The first electrode layer has a first surface and a secondsurface. The first electrode layer is supplied with power at the secondsurface side. The first surface is at the first major surface side. Thesecond surface is at a side opposite to the first surface. The firstelectrode layer includes a first portion. The first portion includes thefirst surface. The first electrode layer includes a ceramic componentand a metal component. A concentration of the ceramic component in thefirst portion is higher than an average concentration of the ceramiccomponent in the first electrode layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional view illustrating an electrostaticchuck according to an embodiment;

FIG. 2 is a cross-sectional view schematically illustrating anenlargement of a portion of the electrostatic chuck according to theembodiment;

FIG. 3A to FIG. 3D are cross-sectional views schematically illustratinga portion of the first electrode layer of the electrostatic chuckaccording to the embodiment;

FIG. 4A and FIG. 4B are plan views schematically illustrating a portionof the electrostatic chuck according to the embodiment; and

FIG. 5 is a cross-sectional view schematically illustrating a waferprocessing apparatus including the electrostatic chuck according to theembodiment.

DETAILED DESCRIPTION

A first invention is an electrostatic chuck including a ceramicdielectric substrate, a base plate, at least one first electrode layer,and at least one second electrode layer; the ceramic dielectricsubstrate has a first major surface where an object to be chucked isplaced, and a second major surface at a side opposite to the first majorsurface; the base plate supports the ceramic dielectric substrate; theat least one first electrode layer is provided inside the ceramicdielectric substrate and connected to a high frequency power supply; theat least one second electrode layer is provided inside the ceramicdielectric substrate and connected to a chucking power supply; the firstelectrode layer is provided between the first major surface and thesecond major surface in a Z-axis direction; the Z-axis direction is fromthe base plate toward the ceramic dielectric substrate; a dimension inthe Z-axis direction of the first electrode layer is larger than adimension in the Z-axis direction of the second electrode layer; thesecond electrode layer is provided between the first electrode layer andthe first major surface in the Z-axis direction; the first electrodelayer has a first surface at the first major surface side, has a secondsurface at a side opposite to the first surface, and is supplied withpower at the second surface side; the first electrode layer includes afirst portion and includes a ceramic component and a metal component;the first portion includes the first surface; and a concentration of theceramic component in the first portion is higher than an averageconcentration of the ceramic component in the first electrode layer.

According to the electrostatic chuck, by providing the first electrodelayer connected to the high frequency power supply inside the ceramicdielectric substrate, for example, the distance between the firstelectrode layer (the lower electrode) and the upper electrode for plasmageneration provided higher than the electrostatic chuck can beshortened. Thereby, for example, compared to when the base plate is usedas the lower electrode for plasma generation, etc., the plasma densitycan be increased using low electrical power. The responsiveness of theplasma control can be increased. Also, according to the electrostaticchuck, by setting the concentration of the ceramic component in thefirst portion to be higher than the average concentration of the ceramiccomponent in the first electrode layer, the insulative properties of thefirst portion positioned at the second electrode layer side can beincreased; and the distance between the first electrode layer and thesecond electrode layer can be shortened. Thereby, the distance betweenthe first electrode layer (the lower electrode) and the upper electrodefor plasma generation can be shortened; the impedance can be reduced;and the plasma controllability can be improved.

A second invention is the electrostatic chuck of the first invention,wherein the concentration of the ceramic component in the first portionis higher than a concentration of the ceramic component in a portion ofthe first electrode layer other than the first portion.

According to the electrostatic chuck, by setting the concentration ofthe ceramic component in the first portion to be higher than theconcentration of the ceramic component in the portion of the firstelectrode layer other than the first portion, the insulative propertiesof the first portion positioned at the second electrode layer side canbe increased; and the distance between the first electrode layer and thesecond electrode layer can be shortened. Thereby, the distance betweenthe first electrode layer (the lower electrode) and the upper electrodefor plasma generation can be shortened; the impedance can be reduced;and the plasma controllability can be improved.

A third invention is the electrostatic chuck of the first or secondinvention, wherein the first electrode layer further includes a secondportion adjacent to the first portion in the Z-axis direction, and theconcentration of the ceramic component in the first portion is higherthan a concentration of the ceramic component in the second portion.

According to the electrostatic chuck, by setting the concentration ofthe ceramic component in the first portion to be higher than theconcentration of the ceramic component in the second portion, theinsulative properties of the first portion positioned at the secondelectrode layer side can be increased; and the distance between thefirst electrode layer and the second electrode layer can be shortened.Thereby, the distance between the first electrode layer (the lowerelectrode) and the upper electrode for plasma generation can beshortened; the impedance can be reduced; and the plasma controllabilitycan be improved.

A fourth invention is the electrostatic chuck of any one of the first tothird inventions, wherein the first electrode layer further includes athird portion including the second surface, and a concentration of themetal component in the third portion is higher than an averageconcentration of the metal component in the first electrode layer.

According to the electrostatic chuck, by setting the concentration ofthe metal component in the third portion to be higher than the averageconcentration of the metal component in the first electrode layer, thesurface of the first electrode layer at the second surface side wherethe high frequency power is supplied and a high frequency current isconsidered to flow due to a skin effect can have a low resistance. Theplasma controllability can be improved thereby.

A fifth invention is the electrostatic chuck of the fourth invention,wherein a thermal conductivity of the metal component is larger than athermal conductivity of the ceramic component.

According to the electrostatic chuck, by setting the thermalconductivity of the metal component included in the first electrodelayer to be larger than the thermal conductivity of the ceramiccomponent included in the first electrode layer and by setting theconcentration of the metal component in the third portion positioned atthe base plate side to be higher than the average concentration of themetal component in the first electrode layer, the heat that is generatedwhen the high frequency power is applied can be dissipated efficientlyto the base plate side; and the unfavorable effects on the in-planeuniformity of the plasma density due to the heat generation can besuppressed.

A sixth invention is the electrostatic chuck of any one of the first tofifth inventions, wherein the first electrode layer further includes athird portion including the second surface, and a concentration of themetal component in the third portion is higher than a concentration ofthe metal component in a portion of the first electrode layer other thanthe third portion.

According to the electrostatic chuck, by setting the concentration ofthe metal component in the third portion to be higher than theconcentration of the metal component in the portion of the firstelectrode layer other than the third portion, the surface of the firstelectrode layer at the second surface side where the high frequencypower is supplied and a high frequency current is considered to flow dueto the skin effect can have a low resistance. The plasma controllabilitycan be improved thereby.

A seventh invention is the electrostatic chuck of any one of the firstto sixth inventions, wherein the first electrode layer further includesa third portion and a fourth portion; the third portion includes thesecond surface; the fourth portion is adjacent to the third portion inthe Z-axis direction; and a concentration of the metal component in thethird portion is higher than a concentration of the metal component inthe fourth portion.

According to the electrostatic chuck, by setting the concentration ofthe metal component in the third portion to be higher than theconcentration of the metal component in the fourth portion, the surfaceof the first electrode layer at the second surface side where the highfrequency power is supplied and a high frequency current is consideredto flow due to the skin effect can have a low resistance. The plasmacontrollability can be improved thereby.

An eighth invention is the electrostatic chuck of any one of the firstto seventh inventions, wherein a concentration of the metal component inthe first portion is 30% or more.

According to the electrostatic chuck, by setting the concentration ofthe metal component in the first portion to be 30% or more, theresistance value of the first portion can be set to a value morefavorable for the lower electrode for plasma generation.

A ninth invention is the electrostatic chuck of any one of the first toeighth inventions, wherein the ceramic component is the same as a majorcomponent of the ceramic dielectric substrate.

According to the electrostatic chuck, by setting the ceramic componentof the first electrode layer to be the same as the major component ofthe ceramic dielectric substrate, the difference between the thermalexpansion coefficient of the ceramic dielectric substrate and thethermal expansion coefficient of the first electrode layer can bereduced; and discrepancies such as peeling between the ceramicdielectric substrate and the first electrode layer, etc., can besuppressed.

A tenth invention is the electrostatic chuck of any one of the first toninth inventions, wherein the ceramic component includes at least one ofaluminum oxide, aluminum nitride, silicon carbide, silicon nitride, oryttrium oxide.

Thus, according to the electrostatic chuck according to the embodiment,for example, by using the first electrode layer including the ceramiccomponent of at least one of aluminum oxide, aluminum nitride, siliconcarbide, silicon nitride, or yttrium oxide, an electrostatic chuck canbe provided that has various excellent characteristics such as plasmaresistance, mechanical strength, thermal conductivity, electricalinsulative properties, etc.

An eleventh invention is the electrostatic chuck of any one of the firstto tenth inventions, wherein the metal component includes at least oneof palladium, silver, platinum, molybdenum, or tungsten.

Thus, according to the electrostatic chuck according to the embodiment,for example, the first electrode layer that includes the metal componentof at least one of palladium, silver, platinum, molybdenum, or tungstencan be used.

A twelfth invention is the electrostatic chuck of any one of the firstto eleventh inventions, wherein a thickness of the first electrode layeris not less than 1 μm and not more than 500 μm.

According to the electrostatic chuck, by setting the thickness of thefirst electrode layer to be in this range, the effects of the skineffect can be reduced; the in-plane uniformity of the plasma density canbe increased; and the decrease of the RF responsiveness can besuppressed.

A thirteenth invention is the electrostatic chuck of any one of thefirst to twelfth inventions, wherein the first electrode layer furtherincludes a third portion including the second surface, and aconcentration of the metal component in the third portion is higher thanan average concentration of the metal component in the second electrodelayer.

According to the electrostatic chuck, because the metal componentconcentration of the third portion of the first electrode layer ishigher than the average concentration of the metal component in thesecond electrode layer, high frequency power can be supplied; and theresistance of the first electrode layer can be reduced sufficiently.

Embodiments of the invention will now be described with reference to thedrawings. Similar components in the drawings are marked with the samereference numerals; and a detailed description is omitted asappropriate.

FIG. 1 is a schematic cross-sectional view illustrating an electrostaticchuck according to an embodiment.

As illustrated in FIG. 1, the electrostatic chuck 100 includes a ceramicdielectric substrate 10, a first electrode layer 11, a second electrodelayer 12, and a base plate 50.

The ceramic dielectric substrate 10 is, for example, a base materialhaving a flat plate configuration made of a sintered ceramic. Forexample, the ceramic dielectric substrate 10 includes aluminum oxide(alumina (Al₂O₃)). For example, the ceramic dielectric substrate 10 isformed of high-purity aluminum oxide. The concentration of aluminumoxide in the ceramic dielectric substrate 10 is, for example, not lessthan 90 mass percent (mass %) and not more than 100 mass %, andfavorably not less than 95 mass percent (mass %) and not more than 100mass %, and more favorably not less than 99 mass percent (mass %) andnot more than 100 mass %. By using high-purity aluminum oxide, theplasma resistance of the ceramic dielectric substrate 10 can beimproved. The concentration of aluminum oxide can be measured byfluorescent X-ray analysis, etc.

The ceramic dielectric substrate 10 may include at least one of aluminumnitride, silicon carbide, silicon nitride, or yttrium oxide (yttria(Y₂O₃)). By using the ceramic dielectric substrate 10 including theseceramics, an electrostatic chuck can be provided that has variousexcellent characteristics such as plasma resistance, mechanicalstrength, thermal conductivity, electrical insulative properties, etc.

The ceramic dielectric substrate 10 has a first major surface 10 a and asecond major surface 10 b. The first major surface 10 a is a surfacewhere an object W to be chucked is placed. The second major surface 10 bis a surface on the side opposite to the first major surface 10 a. Theobject W to be chucked is, for example, a semiconductor substrate suchas a silicon wafer, etc.

In this specification, the direction from the base plate 50 toward theceramic dielectric substrate 10 is taken as a Z-axis direction. Forexample, as illustrated in the drawings, the Z-axis direction is thedirection connecting the first major surface 10 a and the second majorsurface 10 b. The Z-axis direction is, for example, a directionsubstantially perpendicular to the first major surface 10 a and thesecond major surface 10 b. One direction orthogonal to the Z-axisdirection is taken as an X-axis direction; and a direction orthogonal tothe Z-axis direction and the X-axis direction is taken as a Y-axisdirection. In this specification, “in the plane” is, for example, in theX-Y plane.

The first electrode layer 11 and the second electrode layer 12 areprovided inside the ceramic dielectric substrate 10. The first electrodelayer 11 and the second electrode layer 12 are provided between thefirst major surface 10 a and the second major surface 10 b. In otherwords, the first electrode layer 11 and the second electrode layer 12are inserted into the ceramic dielectric substrate 10. For example, thefirst electrode layer 11 and the second electrode layer 12 may be builtinto the ceramic dielectric substrate 10 by sintering as a continuousbody.

The first electrode layer 11 is positioned between the first majorsurface 10 a and the second major surface 10 b in the Z-axis direction.The second electrode layer 12 is positioned between the first majorsurface 10 a and the first electrode layer 11 in the Z-axis direction.In other words, the first electrode layer 11 is positioned between thesecond electrode layer 12 and the second major surface 10 b in theZ-axis direction.

The first electrode layer 11 is connected to a high frequency powersupply (a high frequency power supply 504 of FIG. 5). Plasma isgenerated inside a processing container (a processing container 501 ofFIG. 5) by applying the voltage (the high frequency voltage) from thehigh frequency power supply to the first electrode layer 11 and theupper electrode (an upper electrode 510 of FIG. 5). In other words, thefirst electrode layer 11 is a lower electrode for generating the plasma.The high frequency power supply supplies a high frequency AC(alternating current) current to the first electrode layer 11. Here,“high frequency” is, for example, 200 kHz or more. The first electrodelayer 11 has a first surface 11 a at the first major surface 10 a side,and a second surface 11 b at the side opposite to the first surface 11a. The high frequency current is supplied to the first electrode layer11 at the second surface 11 b side.

The second electrode layer 12 is connected to a chucking power supply (achucking power supply 505 of FIG. 5). The electrostatic chuck 100attracts and holds the object W by an electrostatic force by generatinga charge at the first major surface 10 a side of the second electrodelayer 12 by applying a voltage (a chucking voltage) to the secondelectrode layer 12 from the chucking power supply. In other words, thesecond electrode layer 12 is a chucking electrode for chucking theobject W. The chucking power supply supplies a direct current (DC) or anAC current to the second electrode layer 12. The chucking power supplyis, for example, a DC power supply. The chucking power supply may be,for example, an AC power supply.

The dimension in the Z-axis direction of the first electrode layer 11 islarger than the dimension in the Z-axis direction of the secondelectrode layer 12. In other words, for example, the thickness of thefirst electrode layer 11 is greater than the thickness of the secondelectrode layer 12. By setting the thickness of the first electrodelayer 11 to be greater than the thickness of the second electrode layer12, the effects of the skin effect can be reduced; and the in-planeuniformity of the plasma density can be increased. Methods for measuringthe thicknesses of the first electrode layer 11 and the second electrodelayer 12 are described below.

Thus, by providing the first electrode layer 11 inside the ceramicdielectric substrate 10, the distance between the first electrode layer11 (the lower electrode) and the upper electrode (the upper electrode510 of FIG. 5) of the high frequency power supply provided higher thanthe electrostatic chuck 100 can be shortened. Thereby, for example,compared to the case where the base plate 50 is used as the lowerelectrode, etc., the plasma density can be increased using lowelectrical power. In other words, the electrical power that is necessaryto obtain a high plasma density can be reduced.

The first electrode layer 11 and the second electrode layer 12 havethin-film configurations along the first major surface 10 a and thesecond major surface 10 b of the ceramic dielectric substrate 10.

The first electrode layer 11 includes a ceramic component and a metalcomponent. For example, it is favorable for the first electrode layer 11to be made of a ceramic component and a metal component.

The ceramic component of the first electrode layer 11 includes, forexample, at least one of aluminum oxide, aluminum nitride, siliconcarbide, silicon nitride, or yttrium oxide (yttria (Y₂O₃)).

The ceramic component of the first electrode layer 11 is, for example,the same as a major component of the ceramic dielectric substrate 10. Bysetting the ceramic component of the first electrode layer 11 to be thesame as a major component of the ceramic dielectric substrate 10, thedifference between the thermal expansion coefficient of the ceramicdielectric substrate 10 and the thermal expansion coefficient of thefirst electrode layer 11 can be reduced; and discrepancies such aspeeling between the ceramic dielectric substrate 10 and the firstelectrode layer 11, etc., can be suppressed.

The metal component in the first electrode layer 11 includes, forexample, at least one of palladium (Pd), silver (Ag), platinum (Pt),molybdenum (Mo), or tungsten (W).

The second electrode layer 12 includes a metal component. The secondelectrode layer 12 may include a ceramic component and a metalcomponent. It is favorable for the second electrode layer 12 to be madeof a ceramic component and a metal component.

The ceramic component of the second electrode layer 12 includes, forexample, at least one of aluminum oxide, aluminum nitride, siliconcarbide, silicon nitride, or yttrium oxide. For example, the ceramiccomponent of the second electrode layer 12 is the same as a majorcomponent of the ceramic dielectric substrate 10. For example, theceramic component of the second electrode layer 12 is the same as theceramic component of the first electrode layer 11.

The metal component in the second electrode layer 12 includes, forexample, at least one of palladium (Pd), silver (Ag), platinum (Pt),molybdenum (Mo), or tungsten (W). For example, the metal component inthe second electrode layer 12 is the same as the metal component in thefirst electrode layer 11.

A connection portion 20 that extends to the second major surface 10 bside of the ceramic dielectric substrate 10 is provided at the secondelectrode layer 12. The connection portion 20 is, for example, a via(solid) or a via hole (hollow) that is electrically connected to thesecond electrode layer 12. The connection portion 20 may be a metalterminal connected by an appropriate method such as brazing, etc.

The base plate 50 is a member supporting the ceramic dielectricsubstrate 10. The ceramic dielectric substrate 10 is fixed on the baseplate 50 by a bonding member 60. For example, a silicone bonding agentis used as the bonding member 60.

For example, the base plate 50 is made of a metal such as aluminum, etc.For example, the base plate 50 may be made of a ceramic. For example,the base plate 50 is divided into an upper portion 50 a and a lowerportion 50 b; and a passageway 55 is provided between the upper portion50 a and the lower portion 50 b. One end of the passageway 55 isconnected to an input channel 51; and the other end of the passageway 55is connected to an output channel 52.

The base plate 50 also performs the role of the temperature adjustmentof the electrostatic chuck 100. For example, when cooling theelectrostatic chuck 100, a cooling medium such as helium gas or the likeis caused to inflow through the input channel 51, pass through thepassageway 55, and outflow from the output channel 52. Thereby, the heatof the base plate 50 can be absorbed by the cooling medium; and theceramic dielectric substrate 10 that is mounted on the base plate 50 canbe cooled. On the other hand, when maintaining the temperature of theelectrostatic chuck 100, it is also possible to introduce aheat-retaining medium into the passageway 55. It is also possible toprovide a built-in heating element in the ceramic dielectric substrate10 and/or the base plate 50. The temperature of the object W held by theelectrostatic chuck 100 can be adjusted by adjusting the temperature ofthe base plate 50 and/or the ceramic dielectric substrate 10.

In the example, a channel 14 is provided at the first major surface 10 aside of the ceramic dielectric substrate 10. The channel 14 is recessedin the direction from the first major surface 10 a toward the secondmajor surface 10 b (the Z-axis direction) and extends to be continuousin the X-Y plane. Multiple protrusions 13 (dots) are provided in atleast a portion of the region of the first major surface 10 a where thechannel 14 is not provided. The object W is placed on the multipleprotrusions 13 and is supported by the multiple protrusions 13. Theprotrusion 13 is a surface contacting the back surface of the object W.If the multiple protrusions 13 are provided, a space is formed betweenthe first major surface 10 a and the back surface of the object W placedon the electrostatic chuck 100. For example, the particles that areadhered to the object W can be caused to be in a favorable state byappropriately selecting the height and the number of the protrusions 13,the area ratio and the shapes of the protrusions 13, etc. For example,the height (the dimension in the Z-axis direction) of the multipleprotrusions 13 can be not less than 1 μm and not more than 100 μm, andfavorably not less than 1 μm and not more than 30 μm, and more favorablynot less than 5 μm and not more than 15 μm.

The ceramic dielectric substrate 10 has a through-hole 15 connected tothe channel 14. The through-hole 15 is provided from the second majorsurface 10 b to the first major surface 10 a. In other words, thethrough-hole 15 extends in the Z-axis direction from the second majorsurface 10 b to the first major surface 10 a and pierces the ceramicdielectric substrate 10.

A gas introduction channel 53 is provided in the base plate 50. Forexample, the gas introduction channel 53 is provided to pierce the baseplate 50. The gas introduction channel 53 may not pierce through thebase plate 50, and may be provided to reach the ceramic dielectricsubstrate 10 side by branching partway into other gas introductionchannels 53. The gas introduction channel 53 may be provided in multiplelocations of the base plate 50.

The gas introduction channel 53 communicates with the through-hole 15.In other words, the transfer gas (helium (He) or the like) that inflowsinto the gas introduction channel 53 inflows into the through-hole 15after passing through the gas introduction channel 53.

The transfer gas that inflows into the through-hole 15 inflows into thespace provided between the object W and the channel 14 after passingthrough the through-hole 15. Thereby, the object W can be directlycooled by the transfer gas.

FIG. 2 is a cross-sectional view schematically illustrating anenlargement of a portion of the electrostatic chuck according to theembodiment.

FIG. 2 shows an enlargement of a region R1 shown in FIG. 1.

As illustrated in FIG. 2, the first electrode layer 11 has the firstsurface 11 a and the second surface 11 b. The first surface 11 a is asurface on the first major surface 10 a side. The second surface 11 b isa surface on the side opposite to the first surface 11 a. In otherwords, the first surface 11 a is the surface opposing the secondelectrode layer 12. For example, the second surface 11 b is a surfaceparallel to the first surface 11 a.

The first surface 11 a is, for example, a surface parallel to the firstmajor surface 10 a. For example, a distance D1 along the Z-axisdirection between the first surface 11 a and the first major surface 10a is constant. In other words, the distance D1 is the distance from thefirst major surface 10 a to the upper surface (the first surface 11 a)of the first electrode layer 11. Here, “constant” may include, forexample, the waviness of the first surface 11 a, etc. For example, it issufficient for the distance D1 to be substantially constant when thecross section of the electrostatic chuck 100 is observed by a scanningelectron microscope (SEM), etc., at low magnification (e.g., about 100times). The distance D1 is, for example, about 300 μm.

Thus, the distance between the upper electrode (the upper electrode 510of FIG. 5) and the first electrode layer 11 (the lower electrode) can beconstant by setting the distance D1 along the Z-axis direction betweenthe first surface 11 a and the first major surface 10 a to be constant.Thereby, for example, the in-plane uniformity of the plasma density canbe increased compared to the case where the distance D1 along the Z-axisdirection between the first surface 11 a and the first major surface 10a is not constant, etc.

The thickness of the first electrode layer 11 is, for example, not lessthan 1 μm and not more than 500 μm, and favorably not less than 10 μmand not more than 100 82 m. In other words, the thickness of the firstelectrode layer 11 is a distance D2 along the Z-axis direction betweenthe first surface 11 a and the second surface 11 b. By setting thethickness (the distance D2) of the first electrode layer 11 to be inthis range, the effects of the skin effect can be reduced; and thein-plane uniformity of the plasma density can be increased. For example,the thickness (the distance D2) of the first electrode layer 11 can bedetermined as the average value of the thicknesses at the three pointsin a cross section SEM image of the first electrode layer 11. In thisspecification, the distance D2 is defined as the average value.

As illustrated in FIG. 2, the second electrode layer 12 has a thirdsurface 12 a on the first major surface 10 a side, and a fourth surface12 b on the side opposite to the third surface 12 a. In other words, thefourth surface 12 b is the surface opposing the first electrode layer11. The third surface 12 a is, for example, a surface parallel to thefourth surface 12 b.

The third surface 12 a is, for example, a surface parallel to the firstmajor surface 10 a. For example, a distance D3 along the Z-axisdirection between the third surface 12 a and the first major surface 10a is constant. In other words, the distance D3 is the distance from thefirst major surface 10 a to the upper surface (the third surface 12 a)of the second electrode layer 12.

The thickness of the second electrode layer 12 is, for example,constant. In other words, the thickness of the second electrode layer 12is a distance D4 along the Z-axis direction between the third surface 12a and the fourth surface 12 b. For example, the thickness (the distanceD4) of the second electrode layer 12 can be determined as the averagevalue of the thicknesses at the three points in a cross section SEMimage of the second electrode layer 12.

The thickness of the first electrode layer 11 is, for example, greaterthan the thickness of the second electrode layer 12. By setting thethickness of the first electrode layer 11 to be greater than thethickness of the second electrode layer 12, the effects of the skineffect can be reduced; and the in-plane uniformity of the plasma densitycan be increased.

FIG. 3A to FIG. 3D are cross-sectional views schematically illustratinga portion of the first electrode layer of the electrostatic chuckaccording to the embodiment.

As illustrated in FIG. 3A to FIG. 3D, the first electrode layer 11includes, for example, first to fifth portions 111 to 115.

The first portion 111 includes the first surface 11 a. The first portion111 is, for example, the upper end portion of the first electrode layer11. The second portion 112 is adjacent to the first portion 111 in theZ-axis direction. The second portion 112 is, for example, a portionpositioned under the upper end portion (the first portion 111) of thefirst electrode layer 11.

The third portion 113 includes the second surface 11 b. The thirdportion 113 is, for example, the lower end portion of the firstelectrode layer 11. The fourth portion 114 is adjacent to the thirdportion 113 in the Z-axis direction. The fourth portion 114 is, forexample, a portion positioned on the lower end portion (the thirdportion 113) of the first electrode layer 11.

The fifth portion 115 is a portion positioned between the second portion112 and the fourth portion 114 in the Z-axis direction. The fifthportion 115 is, for example, a portion adjacent to the second portion112 and the fourth portion 114 in the Z-axis direction. The fifthportion 115 is provided as necessary and is omissible. In other words,the second portion 112 and the fourth portion 114 may be adjacent toeach other in the Z-axis direction.

As shown in FIG. 3D, the first electrode layer 11 may further include asixth portion 116 between the fifth portion 115 and the fourth portion114.

Examples in which the first electrode layer 11 includes five layers (thefirst to fifth portions 111 to 115) are shown in FIG. 3A to FIG. 3C; andan example in which the first electrode layer 11 includes six layers isshown in FIG. 3D. In the embodiment, it is sufficient for the firstelectrode layer 11 to include two or more layers; for example, the firstelectrode layer 11 may include three layers (the first to third portions111 to 113), four layers (the first to fourth portions 111 to 114), orseven or more layers. In the case of two layers, the second portion 112includes the second surface 11 b. In the case of three layers, thesecond portion 112 is adjacent to both the first portion 111 and thethird portion 113; and the third portion 113 includes the second surface11 b.

As illustrated in FIG. 3A to FIG. 3C, the first electrode layer 11 inwhich the first portion 111, the second portion 112, the fifth portion115, the fourth portion 114, and the third portion 113 are arranged inorder from the first surface 11 a toward the second surface 11 b willnow be described as an example.

In FIG. 3A to FIG. 3C, the concentration of the ceramic component andthe concentration of the metal component are illustrated by the shadingof the colors. More specifically, darker colors show that theconcentration of the ceramic component is lower (the concentration ofthe metal component is higher); and lighter colors show that theconcentration of the ceramic component is higher (the concentration ofthe metal component is lower).

In the embodiment, the concentration of the ceramic component in thefirst portion 111 is higher than the average concentration of theceramic component in the first electrode layer 11.

Thus, by setting the concentration of the ceramic component in the firstportion 111 to be higher than the average concentration of the ceramiccomponent in the first electrode layer 11, the insulative properties ofthe first portion 111 positioned at the second electrode layer 12 sidecan be increased; and a distance D5 between the first electrode layer 11and the second electrode layer 12 (referring to FIG. 2) can beshortened. Thereby, the distance between the first electrode layer 11(the lower electrode) and the upper electrode 510 for plasma generationcan be shortened; the impedance can be reduced; and the plasmacontrollability can be improved.

As shown in FIG. 3A, for example, the concentration of the ceramiccomponent in the first portion 111 is higher than the concentration ofthe ceramic component in the portion of the first electrode layer 11other than the first portion 111.

In the example shown in FIG. 3A, the concentration of the ceramiccomponent in the first portion 111 is higher than the concentration ofthe ceramic component in the second portion 112 adjacent to the firstportion 111. The concentration of the ceramic component in the thirdportion 113 is lower than the concentration of the ceramic component inthe fourth portion 114. In the example, the fifth portion 115 is furtherincluded; and the concentration of the ceramic component in the fifthportion 115 is lower than the concentration of the ceramic component inthe second portion 112 and higher than the concentration of the ceramiccomponent in the fourth portion 114. That is, in the example, theconcentration of the ceramic component decreases from the first portion111 toward the third portion 113.

In other words, in the example shown in FIG. 3A, the concentration ofthe metal component in the first portion 111 is lower than theconcentration of the metal component in the second portion 112 adjacentto the first portion 111. The concentration of the metal component inthe third portion 113 is higher than the concentration of the metalcomponent in the fourth portion 114. The concentration of the metalcomponent in the fifth portion 115 is higher than the concentration ofthe metal component in the second portion 112 and lower than theconcentration of the metal component in the fourth portion 114. That is,in the example, the concentration of the metal component increases fromthe first portion 111 toward the third portion 113.

In the example shown in FIG. 3B, the concentration of the ceramiccomponent in the first portion 111 is higher than the concentration ofthe ceramic component in the second portion 112. The concentration ofthe ceramic component in the third portion 113 is higher than theconcentration of the ceramic component in the fourth portion 114. In theexample, the fifth portion 115 is further included; and theconcentration of the ceramic component in the fifth portion 115 is lowerthan the concentration of the ceramic component in the second portion112 and lower than the concentration of the ceramic component in thefourth portion 114. That is, in the example, the concentration of theceramic component decreases toward the fifth portion 115 from the firstportion 111; and the concentration of the ceramic component increasesfrom the fifth portion 115 toward the third portion 113.

In other words, in the example shown in FIG. 3B, the concentration ofthe metal component in the first portion 111 is lower than theconcentration of the metal component in the second portion 112. Theconcentration of the metal component in the third portion 113 is lowerthan the concentration of the metal component in the fourth portion 114.The concentration of the metal component in the fifth portion 115 ishigher than the concentration of the metal component in the secondportion 112 and higher than the concentration of the metal component inthe fourth portion 114. That is, in the example, the concentration ofthe metal component increases toward the fifth portion 115 from thefirst portion 111; and the concentration of the metal componentdecreases from the fifth portion 115 toward the third portion 113.

In the example, the concentration of the ceramic component in the firstportion 111 is the same as the concentration of the ceramic component inthe third portion 113; but the concentration of the ceramic component inthe first portion 111 may be higher than the concentration of theceramic component in the third portion 113 or lower than theconcentration of the ceramic component in the third portion 113. In theexample, the concentration of the ceramic component in the secondportion 112 is the same as the concentration of the ceramic component inthe fourth portion 114; but the concentration of the ceramic componentin the second portion 112 may be higher than the concentration of theceramic component in the fourth portion 114 or lower than theconcentration of the ceramic component in the fourth portion 114.

Similarly, in the example, the concentration of the metal component inthe first portion 111 is the same as the concentration of the metalcomponent in the third portion 113; but the concentration of the metalcomponent in the first portion 111 may be higher than the concentrationof the metal component in the third portion 113 or lower than theconcentration of the metal component in the third portion 113. In theexample, the concentration of the metal component in the second portion112 is the same as the concentration of the metal component in thefourth portion 114; but the concentration of the metal component in thesecond portion 112 may be higher than the concentration of the metalcomponent in the fourth portion 114 or lower than the concentration ofthe metal component in the fourth portion 114.

In the example shown in FIG. 3C, the concentration of the ceramiccomponent in the first portion 111 is higher than the concentration ofthe ceramic component in the second portion 112. The concentration ofthe ceramic component in the third portion 113 is higher than theconcentration of the ceramic component in the fourth portion 114. In theexample, the fifth portion 115 is further included; and theconcentration of the ceramic component in the fifth portion 115 ishigher than the concentration of the ceramic component in the secondportion 112 and higher than the concentration of the ceramic componentin the fourth portion 114. That is, in the example, portions (the firstportion 111, the third portion 113, and the fifth portion 115) havingconcentrations of the ceramic component higher than the concentrationsof the ceramic component in the adjacent portions and portions (thesecond portion 112 and the fourth portion 114) having concentrations ofthe ceramic component lower than the concentrations of the ceramiccomponent in the adjacent portions are provided alternately.

In other words, in the example shown in FIG. 3C, the concentration ofthe metal component in the first portion 111 is lower than theconcentration of the metal component in the second portion 112. Theconcentration of the metal component in the third portion 113 is lowerthan the concentration of the metal component in the fourth portion 114.The concentration of the metal component in the fifth portion 115 islower than the concentration of the metal component in the secondportion 112 and lower than the concentration of the metal component inthe fourth portion 114. That is, in the example, portions (the firstportion 111, the third portion 113, and the fifth portion 115) havingconcentrations of the metal component lower than the concentrations ofthe metal component in the adjacent portions and portions (the secondportion 112 and the fourth portion 114) having concentrations of themetal component higher than the concentrations of the metal component inadjacent portions are provided alternately.

In the example, the concentration of the ceramic component in the firstportion 111 is the same as the concentrations of the ceramic componentin the third portion 113 and the fifth portion 115; but theconcentration of the ceramic component in the first portion 111 may behigher than the concentration of the ceramic component in the thirdportion 113 or lower than the concentration of the ceramic component inthe third portion 113. The concentration of the ceramic component in thefirst portion 111 may be higher than the concentration of the ceramiccomponent in the fifth portion 115 or lower than the concentration ofthe ceramic component in the fifth portion 115. The concentration of theceramic component in the third portion 113 may be higher than theconcentration of the ceramic component in the fifth portion 115 or lowerthan the concentration of the ceramic component in the fifth portion115. In the example, the concentration of the ceramic component in thesecond portion 112 is the same as the concentration of the ceramiccomponent in the fourth portion 114; but the concentration of theceramic component in the second portion 112 may be higher than theconcentration of the ceramic component in the fourth portion 114 orlower than the concentration of the ceramic component in the fourthportion 114.

Similarly, in the example, the concentration of the metal component inthe first portion 111 is the same as the concentrations of the metalcomponent in the third portion 113 and the fifth portion 115; but theconcentration of the metal component in the first portion 111 may behigher than the concentration of the metal component in the thirdportion 113 or lower than the concentration of the metal component inthe third portion 113. The concentration of the metal component in thefirst portion 111 may be higher than the concentration of the metalcomponent in the fifth portion 115 or lower than the concentration ofthe metal component in the fifth portion 115. The concentration of themetal component in the third portion 113 may be higher than theconcentration of the metal component in the fifth portion 115 or lowerthan the concentration of the metal component in the fifth portion 115.In the example, the concentration of the metal component in the secondportion 112 is the same as the concentration of the metal component inthe fourth portion 114; but the concentration of the metal component inthe second portion 112 may be higher than the concentration of the metalcomponent in the fourth portion 114 or lower than the concentration ofthe metal component in the fourth portion 114.

In the example shown in FIG. 3D, the concentration of the ceramiccomponent in the first portion 111 is higher than the concentration ofthe ceramic component in the second portion 112. The concentration ofthe ceramic component in the third portion 113 is lower than theconcentration of the ceramic component in the fourth portion 114. In theexample, the fifth portion 115 and the sixth portion 116 are furtherincluded; and the concentration of the ceramic component in the fifthportion 115 is higher than the concentration of the ceramic component inthe second portion 112 and higher than the concentration of the ceramiccomponent in the sixth portion 116. The concentration of the ceramiccomponent in the sixth portion 116 is lower than the concentration ofthe ceramic component in the fourth portion 114. That is, in theexample, portions (the first portion 111, the fourth portion 114, andthe fifth portion 115) having concentrations of the ceramic componenthigher than the concentrations of the ceramic component in the adjacentportions and portions (the second portion 112, the third portion 113,and the sixth portion 116) having concentrations of the ceramiccomponent lower than the concentrations of the ceramic component in theadjacent portions are provided alternately.

In other words, in the example shown in FIG. 3D, the concentration ofthe metal component in the first portion 111 is lower than theconcentration of the metal component in the second portion 112. Theconcentration of the metal component in the third portion 113 is higherthan the concentration of the metal component in the fourth portion 114.The concentration of the metal component in the fifth portion 115 islower than the concentration of the metal component in the secondportion 112 and lower than the concentration of the metal component inthe sixth portion 116. The concentration of the metal component in thesixth portion 116 is higher than the concentration of the metalcomponent in the fourth portion 114. That is, in the example, portions(the first portion 111, the fourth portion 114, and the fifth portion115) having concentrations of the metal component lower than theconcentrations of the metal component in the adjacent portions andportions (the second portion 112, the third portion 113, and the sixthportion 116) having concentrations of the metal component higher thanthe concentrations of the metal component in adjacent portions areprovided alternately.

In the example, the concentration of the ceramic component in the firstportion 111 is the same as the concentrations of the ceramic componentin the fourth portion 114 and the fifth portion 115; but theconcentration of the ceramic component in the first portion 111 may behigher than the concentration of the ceramic component in the fourthportion 114 or lower than the concentration of the ceramic component inthe fourth portion 114. The concentration of the ceramic component inthe first portion 111 may be higher than the concentration of theceramic component in the fifth portion 115 or lower than theconcentration of the ceramic component in the fifth portion 115. Theconcentration of the ceramic component in the fourth portion 114 may behigher than the concentration of the ceramic component in the fifthportion 115 or lower than the concentration of the ceramic component inthe fifth portion 115. In the example, the concentration of the ceramiccomponent in the third portion 113 is the second portion 112 and lowerthan the concentration of the ceramic component in the sixth portion116. In the example, the concentration of the ceramic component in thesecond portion 112 is the same as the concentration of the ceramiccomponent in the sixth portion 116; but the concentration of the ceramiccomponent in the second portion 112 may be higher than the concentrationof the ceramic component in the sixth portion 116 or lower than theconcentration of the ceramic component in the sixth portion 116.

Similarly, in the example, the concentration of the metal component inthe first portion 111 is the same as the concentrations of the metalcomponent in the fourth portion 114 and the fifth portion 115; but theconcentration of the metal component in the first portion 111 may behigher than the concentration of the metal component in the fourthportion 114 or lower than the concentration of the metal component inthe fourth portion 114. The concentration of the metal component in thefirst portion 111 may be higher than the concentration of the metalcomponent in the fifth portion 115 or lower than the concentration ofthe metal component in the fifth portion 115. The concentration of themetal component in the fourth portion 114 may be higher than theconcentration of the metal component in the fifth portion 115 or lowerthan the concentration of the metal component in the fifth portion 115.In the example, the concentration of the metal component in the thirdportion 113 is higher than the concentrations of the metal component inthe second portion 112 and the sixth portion 116. In the example, theconcentration of the metal component in the second portion 112 is thesame as the concentration of the metal component in the sixth portion116; but the concentration of the metal component in the second portion112 may be higher than the concentration of the metal component in thesixth portion 116 or lower than the concentration of the metal componentin the sixth portion 116.

As illustrated in FIG. 3A to FIG. 3D, by setting the concentration ofthe ceramic component in the first portion 111 to be higher than theconcentration of the ceramic component in the second portion 112, theinsulative properties of the first portion 111 positioned at the secondelectrode layer 12 side can be increased; and the distance D5 betweenthe first electrode layer 11 and the second electrode layer 12(referring to FIG. 2) can be shortened. Thereby, the distance betweenthe first electrode layer 11 (the lower electrode) and the upperelectrode 510 for plasma generation can be shortened; the impedance canbe reduced; and the plasma controllability can be improved.

As illustrated in FIG. 3A, by setting the concentration of the ceramiccomponent in the first portion 111 to be higher than the concentrationsof the ceramic component in the portions (e.g., the second to fifthportions 112 to 115) other than the first portion 111, the insulativeproperties of the first portion 111 positioned at the second electrodelayer 12 side can be increased; and the distance D5 between the firstelectrode layer 11 and the second electrode layer 12 (referring to FIG.2) can be shortened. Thereby, the distance between the first electrodelayer 11 (the lower electrode) and the upper electrode 510 for plasmageneration can be shortened; the impedance can be reduced; and theplasma controllability can be improved.

As illustrated in FIG. 3A and FIG. 3D, by setting the concentration ofthe metal component in the third portion 113 to be higher than theaverage concentration of the metal component in the first electrodelayer 11, the surface of the first electrode layer 11 on the secondsurface 11 b side where the high frequency power is supplied and a highfrequency current is considered to flow due to the skin effect can havea low resistance. The plasma controllability can be improved thereby.

It is favorable for the thermal conductivity of the metal componentincluded in the first electrode layer 11 to be larger than the thermalconductivity of the ceramic component included in the first electrodelayer 11 in the case where the concentration of the metal component inthe third portion 113 is higher than the average concentration of themetal component in the first electrode layer 11.

Thus, by setting the thermal conductivity of the metal componentincluded in the first electrode layer 11 to be larger than the thermalconductivity of the ceramic component included in the first electrodelayer 11 and setting the concentration of the metal component in thethird portion 113 positioned at the base plate 50 side to be higher thanthe average concentration of the metal component in the first electrodelayer 11, the heat that is generated when the high frequency power isapplied can be dissipated efficiently to the base plate 50 side; and theunfavorable effects on the in-plane uniformity of the plasma density dueto the heat generation can be suppressed.

As illustrated in FIG. 3A and FIG. 3D, by setting the concentration ofthe metal component in the third portion 113 to be higher than theconcentrations of the metal component in the portions of the firstelectrode layer 11 (e.g., the first portion 111, the second portion 112,the fourth portion 114, the fifth portion 115, and the sixth portion116) other than the third portion 113, the surface of the firstelectrode layer 11 on the second surface 11 b side where the highfrequency power is supplied and a high frequency current is consideredto flow due to the skin effect can have a low resistance. The plasmacontrollability can be improved thereby.

As illustrated in FIG. 3A and FIG. 3D, by setting the concentration ofthe metal component in the third portion 113 to be higher than theconcentration of the metal component in the fourth portion 114, thesurface of the first electrode layer 11 on the second surface 11 b sidewhere the high frequency power is supplied and a high frequency currentis considered to flow due to the skin effect can have a low resistance.The plasma controllability can be improved thereby.

It is also favorable for the concentration of the metal component in thethird portion 113 of the first electrode layer 11 to be higher than theaverage concentration of the metal component in the second electrodelayer 12. The resistance of the first electrode layer 11 to which thehigh frequency power is supplied can be sufficiently low thereby.

On the other hand, as illustrated in FIG. 3B and FIG. 3C, by setting theconcentration of the ceramic component in the third portion 113 to behigher than the concentration of the ceramic component in the fourthportion 114, the difference between the thermal expansion coefficient ofthe ceramic dielectric substrate 10 and the thermal expansioncoefficient of the first electrode layer 11 can be reduced; anddiscrepancies such as peeling between the ceramic dielectric substrate10 and the first electrode layer 11, etc., can be suppressed also forthe first electrode layer 11 which is thicker than the second electrodelayer 12.

The concentrations of the ceramic component and the concentrations ofthe metal component are nonuniform in the Z-axis direction for each ofthe first to sixth portions 111 to 116. For example, the concentrationsof the ceramic component and the concentrations of the metal componentmay change continuously in the Z-axis direction for each of the first tosixth portions 111 to 116.

The concentration of the ceramic component in the first portion 111 is,for example, not more than 70%, and favorably not less than 1% and notmore than 70%, and more favorably not less than 20% and not more than60%.

The concentration of the metal component in the first portion 111 is,for example, not less than 30%, and favorably not less than 30% and notmore than 99%, and more favorably not less than 40% and not more than80%. Thus, by setting the concentration of the metal component in thefirst portion 111 to be not less than 30%, the resistance value of thefirst portion 111 can be a value more favorable for the lower electrodefor plasma generation.

In the embodiment, the concentration of the ceramic component and theconcentration of the metal component can be determined by observing thecross section of each portion of the first electrode layer 11 by SEM-EDX(Energy Dispersive X-ray Spectroscopy) and by performing image analysis.More specifically, the concentration of the ceramic component and theconcentration of the metal component can be calculated by acquiring across section SEM-EDX image of each portion of the first electrode layer11, classifying the image into the ceramic component and the metalcomponent by EDX component analysis, and by performing image analysis todetermine the area ratio of the ceramic component and the metalcomponent.

The average concentration of the ceramic component in the firstelectrode layer 11 can be calculated as the average value of the ceramicconcentrations of the portions (the first to sixth portions 111 to 116)determined by the method recited above. The average concentration of themetal component in the first electrode layer 11 can be calculated as theaverage value of the metal concentrations of the portions (the first tosixth portions 111 to 116) determined by the method recited above.

According to the embodiment, the plasma controllability can be increasedby adjusting at least one of the concentration of the ceramic componentof the first electrode layer 11 or the concentration of the metalcomponent. The resistance value (the insulative properties) and thethermal expansion coefficient of the first electrode layer 11, the heatgeneration, the heat dissipation, and the thermal uniformity of thefirst electrode layer 11 when the voltage is applied from the highfrequency power supply 504, etc., can be optimized.

FIG. 4A and FIG. 4B are plan views schematically illustrating a portionof the electrostatic chuck according to the embodiment.

These drawings are plan views viewing the second electrode layer 12 fromthe third surface 12 a side (the upper side) in a state in which theportion of the electrostatic chuck 100 positioned at the first majorsurface 10 a side (the upper side) of the second electrode layer 12 (thethird surface 12 a) of the ceramic dielectric substrate 10 is notillustrated.

As illustrated in FIG. 4A and FIG. 4B, the second electrode layer 12 maybe unipolar or bipolar. In the case where the second electrode layer 12is unipolar, one second electrode layer 12 that spreads along the X-Yplane is provided as illustrated in FIG. 4A. The second electrode layer12 is, for example, substantially circular when viewed along the Z-axisdirection. On the other hand, in the case where the second electrodelayer 12 is bipolar, two second electrode layers 12 that spread alongthe X-Y plane and are positioned in the same plane are provided asillustrated in FIG. 4B. The second electrode layers 12 each are, forexample, substantially semicircular when viewed along the Z-axisdirection. For example, the second electrode layer 12 may have a patternspreading along the X-Y plane.

For example, a portion of the first electrode layer 11 does not overlapthe second electrode layer 12 in the Z-axis direction. The total of thesurface area of the first surface 11a (the surface on the first majorsurface 10 a side) of the first electrode layer 11 is, for example,larger than the total of the surface area of the third surface 12 a (thesurface on the first major surface 10 a side) of the second electrodelayer 12. In other words, when viewed along the Z-axis direction, thetotal of the surface area of the first electrode layer 11 is larger thanthe total of the surface area of the second electrode layer 12. Thein-plane uniformity of the plasma density can be increased furtherthereby.

A method for making the ceramic dielectric substrate 10 inside which thefirst electrode layer 11 and the second electrode layer 12 are providedwill now be described.

For example, the ceramic dielectric substrate 10 inside which the firstelectrode layer 11 and the second electrode layer 12 are provided can bemade by stacking each layer in a state in which the first major surface10 a side is down and by sintering the stacked body. More specifically,for example, the second electrode layer 12 is stacked on a first layerwhich is a ceramic layer including the first major surface 10 a. Asecond layer which is a ceramic layer between the first electrode layer11 and the second electrode layer 12 is stacked on the second electrodelayer 12. The first electrode layer 11 is stacked on the second layer. Athird layer which is a ceramic layer including the second major surface10 b is stacked on the first electrode layer 11. Then, the stacked bodyis sintered.

For example, the first electrode layer 11 is formed by screen printing,paste coating (spin coating, a coater, inkjet, a dispenser, etc.), vapordeposition, etc. For example, the first electrode layer 11 can be formedby stacking the layers over multiple times in the state in which thefirst major surface 10 a is down. At this time, for example, theconcentration of the ceramic component and the concentration of themetal component can be adjusted in the Z-axis direction by changing thecompositions of the stacked layers.

FIG. 5 is a cross-sectional view schematically illustrating a waferprocessing apparatus including the electrostatic chuck according to theembodiment.

As illustrated in FIG. 5, the wafer processing apparatus 500 includesthe processing container 501, the high frequency power supply 504, thechucking power supply 505, the upper electrode 510, and theelectrostatic chuck 100. A processing gas inlet 502 for introducing aprocessing gas to the interior and the upper electrode 510 are providedat the ceiling of the processing container 501. An exhaust port 503 forevacuating the interior is provided at the bottom plate of theprocessing container 501. The electrostatic chuck 100 is disposed underthe upper electrode 510 inside the processing container 501. The upperelectrode 510 and the first electrode layer 11 of the electrostaticchuck 100 are connected to the high frequency power supply 504. Thesecond electrode layer 12 of the electrostatic chuck 100 is connected tothe chucking power supply 505.

The first electrode layer 11 and the upper electrode 510 are provided tobe substantially parallel and separated from each other by a prescribedspacing. More specifically, the first surface 11 a of the firstelectrode layer 11 is substantially parallel to a lower surface 510 a ofthe upper electrode 510. Also, the first major surface 10 a of theceramic dielectric substrate 10 is substantially parallel to the lowersurface 510 a of the upper electrode 510. The object W is placed on thefirst major surface 10 a positioned between the first electrode layer 11and the upper electrode 510.

When a voltage (a high frequency voltage) is applied to the firstelectrode layer 11 and the upper electrode 510 from the high frequencypower supply 504, high frequency electric discharge occurs; theprocessing gas that is introduced to the processing container 501 isexcited by the plasma and activated; and the object W is processed.

When a voltage (a chucking voltage) is applied to the second electrodelayer 12 from the chucking power supply 505, a charge is generated atthe first major surface 10 a side of the second electrode layer 12; andthe object W is held to the electrostatic chuck 100 by an electrostaticforce.

According to the embodiments as described above, an electrostatic chuckcan be provided in which the plasma controllability can be increased.

Hereinabove, embodiments of the invention are described. However, theinvention is not limited to these descriptions. Appropriate designmodifications made by one skilled in the art for the embodimentsdescribed above also are within the scope of the invention to the extentthat the features of the invention are included. For example, theconfigurations, the dimensions, the materials, the arrangements, and thelike of the electrostatic chuck can be modified appropriately and arenot limited to those illustrated.

Also, the components included in the embodiments described above can becombined within the limits of technical feasibility; and suchcombinations also are within the scope of the invention to the extentthat the features of the invention are included.

What is claimed is:
 1. An electrostatic chuck, comprising: a ceramicdielectric substrate having a first major surface and a second majorsurface, the first major surface being where an object to be chucked isplaced, the second major surface being at a side opposite to the firstmajor surface; a base plate supporting the ceramic dielectric substrate;at least one first electrode layer provided inside the ceramicdielectric substrate and connected to a high frequency power supply; andat least one second electrode layer provided inside the ceramicdielectric substrate and connected to a chucking power supply, the firstelectrode layer being provided between the first major surface and thesecond major surface in a Z-axis direction, the Z-axis direction beingfrom the base plate toward the ceramic dielectric substrate, a dimensionin the Z-axis direction of the first electrode layer being larger than adimension in the Z-axis direction of the second electrode layer, thesecond electrode layer being provided between the first electrode layerand the first major surface in the Z-axis direction, the first electrodelayer having a first surface and a second surface and being suppliedwith power at the second surface side, the first surface being at thefirst major surface side, the second surface being at a side opposite tothe first surface, the first electrode layer including a first portionand including a ceramic component and a metal component, the firstportion including the first surface, a concentration of the ceramiccomponent in the first portion being higher than an averageconcentration of the ceramic component in the first electrode layer. 2.The chuck according to claim 1, wherein the concentration of the ceramiccomponent in the first portion is higher than a concentration of theceramic component in a portion of the first electrode layer other thanthe first portion.
 3. The chuck according to claim 1, wherein the firstelectrode layer further includes a second portion adjacent to the firstportion in the Z-axis direction, and the concentration of the ceramiccomponent in the first portion is higher than a concentration of theceramic component in the second portion.
 4. The chuck according to claim1, wherein the first electrode layer further includes a third portionincluding the second surface, and a concentration of the metal componentin the third portion is higher than an average concentration of themetal component in the first electrode layer.
 5. The chuck according toclaim 4, wherein a thermal conductivity of the metal component is largerthan a thermal conductivity of the ceramic component.
 6. The chuckaccording to claim 1, wherein the first electrode layer further includesa third portion including the second surface, and a concentration of themetal component in the third portion is higher than a concentration ofthe metal component in a portion of the first electrode layer other thanthe third portion.
 7. The chuck according to claim 1, wherein the firstelectrode layer further includes a third portion and a fourth portion,the third portion including the second surface, the fourth portion beingadjacent to the third portion in the Z-axis direction, and aconcentration of the metal component in the third portion is higher thana concentration of the metal component in the fourth portion.
 8. Thechuck according to claim 1, wherein a concentration of the metalcomponent in the first portion is 30% or more.
 9. The chuck according toclaim 1, wherein the ceramic component is the same as a major componentof the ceramic dielectric substrate.
 10. The chuck according to claim 1,wherein the ceramic component includes at least one of aluminum oxide,aluminum nitride, silicon carbide, silicon nitride, or yttrium oxide.11. The chuck according to claim 1, wherein the metal component includesat least one of palladium, silver, platinum, molybdenum, or tungsten.12. The chuck according to claim 1, wherein a thickness of the firstelectrode layer is not less than 1 μm and not more than 500 μm.
 13. Thechuck according to claim 1, wherein the first electrode layer furtherincludes a third portion including the second surface, and aconcentration of the metal component in the third portion is higher thanan average concentration of the metal component in the second electrodelayer.